Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/6078
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dc.contributor.authorKarakaya, Merve-
dc.contributor.authorBilgilisoy, Elif-
dc.contributor.authorArı, Ozan-
dc.contributor.authorSelamet, Yusuf-
dc.date.accessioned2017-08-11T07:47:17Z
dc.date.available2017-08-11T07:47:17Z
dc.date.issued2016-07-01
dc.identifier.citationKarakaya, M., Bilgilisoy, E., Arı, O., and Selamet, Y. (2016). Surface roughness estimation of MBE grown CdTe/GaAs(211)B by ex-situ spectroscopic ellipsometry. AIP Advances, 6(7). doi:10.1063/1.4959223en_US
dc.identifier.issn2158-3226
dc.identifier.issn2158-3226-
dc.identifier.urihttp://doi.org/10.1063/1.4959223
dc.identifier.urihttp://hdl.handle.net/11147/6078
dc.description.abstractSpectroscopic ellipsometry (SE) ranging from 1.24 eV to 5.05 eV is used to obtain the film thickness and optical properties of high index (211) CdTe films. A three-layer optical model (oxide/CdTe/GaAs) was chosen for the ex-situ ellipsometric data analysis. Surface roughness cannot be determined by the optical model if oxide is included. We show that roughness can be accurately estimated, without any optical model, by utilizing the correlation between SE data (namely the imaginary part of the dielectric function, <ϵ2 > or phase angle, ψ) and atomic force microscopy (AFM) roughness. <ϵ2 > and ψ values at 3.31 eV, which corresponds to E1 critical transition energy of CdTe band structure, are chosen for the correlation since E1 gives higher resolution than the other critical transition energies. On the other hand, due to the anisotropic characteristic of (211) oriented CdTe surfaces, SE data (<ϵ2 > and ψ) shows varieties for different azimuthal angle measurements. For this reason, in order to estimate the surface roughness by considering these correlations, it is shown that SE measurements need to be taken at the same surface azimuthal angle. Estimating surface roughness in this manner is an accurate way to eliminate cumbersome surface roughness measurement by AFM.en_US
dc.description.sponsorshipGediz Project at Izmir Institute of Technologyen_US
dc.language.isoenen_US
dc.publisherAmerican Institute of Physicsen_US
dc.relation.ispartofAIP Advancesen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectCadmium tellurideen_US
dc.subjectEllipsometryen_US
dc.subjectOptical correlationen_US
dc.subjectSurface roughnessen_US
dc.subjectSpectroscopic ellipsometryen_US
dc.titleSurface roughness estimation of MBE grown CdTe/GaAs(211)B by ex-situ spectroscopic ellipsometryen_US
dc.typeArticleen_US
dc.authoridTR246463en_US
dc.authoridTR200803en_US
dc.institutionauthorKarakaya, Merve-
dc.institutionauthorBilgilisoy, Elif-
dc.institutionauthorArı, Ozan-
dc.institutionauthorSelamet, Yusuf-
dc.departmentIzmir Institute of Technology. Materials Science and Engineeringen_US
dc.identifier.volume6en_US
dc.identifier.issue7en_US
dc.identifier.wosWOS:000382403600036en_US
dc.identifier.scopus2-s2.0-84978639876en_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.identifier.doi10.1063/1.4959223-
dc.relation.doi10.1063/1.4959223en_US
dc.coverage.doi10.1063/1.4959223en_US
dc.identifier.scopusqualityQ2-
item.openairetypeArticle-
item.languageiso639-1en-
item.fulltextWith Fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
item.grantfulltextopen-
Appears in Collections:Materials Science and Engineering / Malzeme Bilimi ve Mühendisliği
Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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