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https://hdl.handle.net/11147/2331
Title: | Effect of Ta buffer layer and thickness on the structural and magnetic properties of Co thin films | Authors: | Vahaplar, Kadir Tarı, Süleyman Tokuç, Hüseyin Okur, Salih |
Keywords: | Cobalt Magnetron sputtering systems Smooth surface Thickness of the film |
Publisher: | AVS Science and Technology Society | Source: | Vahaplar, K., Tarı, S., Tokuç, H., and Okur, S. (2009). Effect of Ta buffer layer and thickness on the structural and magnetic properties of Co thin films. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 27(5), 2112-2116. doi:10.1116/1.3196784 | Abstract: | Single Co and Ta/Co bilayers were grown on Si(100) substrates in a magnetron sputtering system. The effect of Ta buffer layer and the thickness of Co layer on the structural and magnetic properties of the Co layers has been studied. A single Co layer shows a textured structure above thickness of 40 nm according to the x-ray diffraction (XRD) pattern. The magnetic properties of Co layers depend significantly on the thickness of the films. Ta grows as highly textured Β -Ta (tetragonal) phase on Si with a smooth surface. The XRD and atomic force microscopy results show that the Ta buffer layer improves the structural properties dramatically, resulting in a strongly textured and smoother surface morphology. The Ta layer also affects the magnetic properties of Co layers to a large extent, especially inducing an in-plane anisotropy in thin Co films. | URI: | http://dx.doi.org/10.1116/1.3196784 http://hdl.handle.net/11147/2331 |
ISSN: | 1071-1023 1071-1023 |
Appears in Collections: | Physics / Fizik Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection |
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