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https://hdl.handle.net/11147/2331
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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Vahaplar, Kadir | - |
dc.contributor.author | Tarı, Süleyman | - |
dc.contributor.author | Tokuç, Hüseyin | - |
dc.contributor.author | Okur, Salih | - |
dc.date.accessioned | 2016-10-26T10:44:45Z | |
dc.date.available | 2016-10-26T10:44:45Z | |
dc.date.issued | 2009 | |
dc.identifier.citation | Vahaplar, K., Tarı, S., Tokuç, H., and Okur, S. (2009). Effect of Ta buffer layer and thickness on the structural and magnetic properties of Co thin films. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 27(5), 2112-2116. doi:10.1116/1.3196784 | en_US |
dc.identifier.issn | 1071-1023 | |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | http://dx.doi.org/10.1116/1.3196784 | |
dc.identifier.uri | http://hdl.handle.net/11147/2331 | |
dc.description.abstract | Single Co and Ta/Co bilayers were grown on Si(100) substrates in a magnetron sputtering system. The effect of Ta buffer layer and the thickness of Co layer on the structural and magnetic properties of the Co layers has been studied. A single Co layer shows a textured structure above thickness of 40 nm according to the x-ray diffraction (XRD) pattern. The magnetic properties of Co layers depend significantly on the thickness of the films. Ta grows as highly textured Β -Ta (tetragonal) phase on Si with a smooth surface. The XRD and atomic force microscopy results show that the Ta buffer layer improves the structural properties dramatically, resulting in a strongly textured and smoother surface morphology. The Ta layer also affects the magnetic properties of Co layers to a large extent, especially inducing an in-plane anisotropy in thin Co films. | en_US |
dc.description.sponsorship | TÜBİTAK TBAG-105T109 | en_US |
dc.language.iso | en | en_US |
dc.publisher | AVS Science and Technology Society | en_US |
dc.relation.ispartof | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena | en_US |
dc.rights | info:eu-repo/semantics/openAccess | en_US |
dc.subject | Cobalt | en_US |
dc.subject | Magnetron sputtering systems | en_US |
dc.subject | Smooth surface | en_US |
dc.subject | Thickness of the film | en_US |
dc.title | Effect of Ta buffer layer and thickness on the structural and magnetic properties of Co thin films | en_US |
dc.type | Article | en_US |
dc.institutionauthor | Vahaplar, Kadir | - |
dc.institutionauthor | Tarı, Süleyman | - |
dc.institutionauthor | Tokuç, Hüseyin | - |
dc.institutionauthor | Okur, Salih | - |
dc.department | İzmir Institute of Technology. Physics | en_US |
dc.identifier.volume | 27 | en_US |
dc.identifier.issue | 5 | en_US |
dc.identifier.startpage | 2112 | en_US |
dc.identifier.endpage | 2116 | en_US |
dc.identifier.wos | WOS:000270447400010 | en_US |
dc.identifier.scopus | 2-s2.0-70349673587 | en_US |
dc.relation.tubitak | info:eu-repo/grantAgreement/TUBITAK/TBAG/105T109 | en_US |
dc.relation.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |
dc.identifier.doi | 10.1116/1.3196784 | - |
dc.relation.doi | 10.1116/1.3196784 | en_US |
dc.coverage.doi | 10.1116/1.3196784 | en_US |
local.message.claim | 2022-06-07T11:49:21.090+0300 | * |
local.message.claim | |rp02977 | * |
local.message.claim | |submit_approve | * |
local.message.claim | |dc_contributor_author | * |
local.message.claim | |None | * |
dc.identifier.wosquality | N/A | - |
dc.identifier.scopusquality | N/A | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.grantfulltext | open | - |
item.cerifentitytype | Publications | - |
item.fulltext | With Fulltext | - |
item.openairetype | Article | - |
item.languageiso639-1 | en | - |
crisitem.author.dept | 04.05. Department of Pyhsics | - |
crisitem.author.dept | 04.05. Department of Pyhsics | - |
Appears in Collections: | Physics / Fizik Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection |
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