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Title: Anisotropic etching of CVD grown graphene for ammonia sensing
Authors: Yağmurcukardeş, Nesli
Bayram, Abdullah
Aydın, Hasan
Yağmurcukardeş, Mehmet
Açıkbaş, Yaser
Peeters, François M.
Çelebi, Cem
Izmir Institute of Technology
İzmir Katip Çelebi Üniversitesi
Izmir Institute of Technology
Izmir Institute of Technology
Uşak Üniversitesi
Universiteit Antwerpen
Izmir Institute of Technology
Keywords: Ammonia
Anisotropic etching
Gas sensor
Issue Date: Mar-2022
Publisher: Institute of Electrical and Electronics Engineers Inc.
Abstract: Bare chemical vapor deposition (CVD) grown graphene (GRP) was anisotropically etched with various etching parameters. The morphological and structural characterizations were carried out by optical microscopy and the vibrational properties substrates were obtained by Raman spectroscopy. The ammonia adsorption and desorption behavior of graphene-based sensors were recorded via quartz crystal microbalance (QCM) measurements at room temperature. The etched samples for ambient NH3 exhibited nearly 35% improvement and showed high resistance to humidity molecules when compared to bare graphene. Besides exhibiting promising sensitivity to NH3 molecules, the etched graphene-based sensors were less affected by humidity. The experimental results were collaborated by Density Functional Theory (DFT) calculations and it was shown that while water molecules fragmented into H and O, NH3 interacts weakly with EGPR2 sample which reveals the enhanced sensing ability of EGPR2. Apparently, it would be more suitable to use EGRP2 in sensing applications due to its sensitivity to NH3 molecules, its stability, and its resistance to H2O molecules in humid ambient.
Appears in Collections:Materials Science and Engineering / Malzeme Bilimi ve Mühendisliği
Photonics / Fotonik
Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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