Nanoscale curved dielectric film characterization beyond diffraction limits using spatially structured illumination

Abstract

Optical fiber based sensor systems often utilize thin dielectric films coated on non-planar surfaces are needed to be inspected for quality assurance. However, non-destructive optical characterization of these films is not a simple method especially on curved large surfaces. In this study, we propose a real time procedure to estimate the optical properties of sub-wavelength transparent dielectric films coated on optical fibers. The paper includes developing a mathematical model and its experimental verification. The near field phase diffraction method is combined with the structured light illumination that is spatial modes of optical fibers to estimate the thickness of the phase object beyond the classical diffraction limits. Numerical simulations and experimental results show that the film thickness can safely be characterized up to one tenth of wavelength of interest via selective spatial field distribution determined according to the morphology of the thin film. The outcomes have good agreements with destructive Scanning Electron Microscope (SEM) measurements. © 2020 Elsevier Inc.