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Title: The controllable deposition of large area roll-to-roll sputtered ito thin films for photovoltaic applications
Authors: Demirhan, Yasemin
Köseoğlu, Hasan
Türkoğlu, Fulya
Uyanık, Zemzem
Özdemir, Mehtap
Aygün, Gülnur
Özyüzer, Lütfi
Keywords: Transparent conducting oxides (TCO)
ITO thin films
Large area roll to roll sputtering
Optical emission spectroscopy
Flexible electrodes for photovoltaics
Publisher: Elsevier
Abstract: In the present study, using a large area roll-to-roll DC magnetron sputtering system deposition of ITO thin films on polyethylene terephthalate (PET) substrates were achieved. In order to investigate the effect of growth conditions on the film properties all through the deposition process, optical emission spectroscopy (OES) analysis have been accomplished in a governable way. The consequences of Oxygen partial pressure and film thickness on electrical, and optical properties of the films were determined. It was shown that the intensity of optical emission peaks are subjected to the discharge power and as well as the O-2/Ar flow ratio. Large area, uniform ITO films with relatively high transparency and low electrical resistivity (R(2)(<)50 Omega/sqr) were succesfully deposited on PET substrates. The significance of both the figure of merit (FOM) and the optical band gap values on the performance of different TCO thin films were addressed. In this work, the obtained results suggest that the overall performance is sufficient to implement the ITO films in photovoltaic and OLED applications. (C) 2019 Elsevier Ltd. All rights reserved.
ISSN: 0960-1481
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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