Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/8803
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dc.contributor.authorRouhi, Sina-
dc.contributor.authorMartinez-Medina, Jose Enrique-
dc.contributor.authorÖzdemir, Mehtap-
dc.contributor.authorErtuğrul, Mehmet-
dc.contributor.authorAygün, Gülnur-
dc.contributor.authorÖzyüzer, Lütfi-
dc.date.accessioned2020-07-18T08:31:26Z-
dc.date.available2020-07-18T08:31:26Z-
dc.date.issued2020-
dc.identifier.issn0042-207X-
dc.identifier.urihttps://doi.org/10.1016/j.vacuum.2020.109167-
dc.identifier.urihttps://hdl.handle.net/11147/8803-
dc.description.abstractThe aim of this study is to calculate the optimum lifetime of Molybdenum (Mo) thermal evaporation boats for Copper (Cu) filling in thin film technologies. Three types of Mo boats with thicknesses of 0.2, 0.3 and 0.5 mm were used during the experiments under the high vacuum condition about 6.0 x 10(-6) Torr. The behavior of each boat was investigated by focusing on the total amount of evaporation material, operational time and applied power. Prior to the deposition process, material was loaded on the evaporation boat by two methods. In the first method, Cu wire was cut into 1 cm long, then every boat was filled with this amount of Cu material. The second alternative feeding method is to use a wire-feeder step motor, which refills boat with Cu wire during evaporation process. The latter one is very useful for continuous deposition process since there is no need to break the vacuum state. In both methods, however, the number of failures during operations increases after a series of experiments have been taken place because of boat aging. The results of failures have been analyzed by various methods, and it has been observed that thinner boats showed better stability for long time operation by continuous feeding technique.en_US
dc.language.isoenen_US
dc.publisherElsevieren_US
dc.relation.ispartofVacuumen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectMolybdenum boat's lifetimeen_US
dc.subjectThermal evaporationen_US
dc.subjectContinuous feedingen_US
dc.titleA comprehensive study of molybdenum boats behavior during service life for continuous thermal evaporation technique, used in thin film technologyen_US
dc.typeArticleen_US
dc.institutionauthorRouhi, Sina-
dc.institutionauthorMartinez-Medina, Jose Enrique-
dc.institutionauthorÖzdemir, Mehtap-
dc.institutionauthorAygün, Gülnur-
dc.institutionauthorÖzyüzer, Lütfi-
dc.departmentİzmir Institute of Technology. Physicsen_US
dc.identifier.volume176en_US
dc.identifier.wosWOS:000538144400003en_US
dc.identifier.scopus2-s2.0-85080994733en_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.identifier.doi10.1016/j.vacuum.2020.109167-
dc.relation.doi10.1016/j.vacuum.2020.109167en_US
dc.coverage.doi10.1016/j.vacuum.2020.109167en_US
dc.identifier.wosqualityQ2-
dc.identifier.scopusqualityQ1-
item.grantfulltextopen-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
item.openairetypeArticle-
item.languageiso639-1en-
item.fulltextWith Fulltext-
crisitem.author.dept04.05. Department of Pyhsics-
crisitem.author.dept04.05. Department of Pyhsics-
crisitem.author.dept04.05. Department of Pyhsics-
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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