Browsing "Physics / Fizik" by Subject Reactive RF sputtering
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| Sep-2018 | Comparision of in situ spectroscopic ellipsometer and ex situ x-ray photoelectron spectroscopy depth profiling analysis of HfO2/Hf/Si multilayer structure | Cantaş, Ayten; Özyüzer, Lütfi ; Aygün, Gülnur |