Please use this identifier to cite or link to this item: https://hdl.handle.net/11147/5857
Title: Improvement of optical and electrical properties of ITO thin films by electro-annealing
Authors: Köseoğlu, Hasan
Türkoğlu, Fulya
Kurt, Metin
Yaman, Mutlu Devran
Akça, Fatime Gülşah
Aygün, Gülnur
Özyüzer, Lütfi
Köseoğlu, Hasan
Türkoğlu, Fulya
Kurt, Metin
Yaman, Mutlu Devran
Akça, Fatime Gülşah
Aygün, Gülnur
Özyüzer, Lütfi
Izmir Institute of Technology. Physics
Keywords: Large area magnetron sputtering
Annealing
Thin films
Energy gap
ITO thin films
Issue Date: Oct-2015
Publisher: Elsevier Ltd.
Source: Köseoğlu, H., Türkoğlu, F., Kurt, M., Yaman, M. D., Akça, F. G., Aygün, G., and Özyüzer, L. (2015). Improvement of optical and electrical properties of ITO thin films by electro-annealing. Vacuum, 120, 8-13. doi:10.1016/j.vacuum.2015.06.027
Abstract: The effect of electro-annealing in vacuum and air on the optical and electrical properties of ITO thin films grown by large area DC magnetron sputtering was investigated. Moreover, the performances of the electro-annealed ITO thin films in vacuum and air were compared. Electro-annealing was performed by applying 0.75, 1.00, 1.25 and 1.50 A constant ac current to the ITO thin films. It was observed that the crystallinity of the films was better for the ITO thin films electro-annealed in vacuum. The changes in sheet resistance of electro-annealed ITO thin films with applied currents were detailed. The transmittance of the films increased for both electro-annealing in vacuum and air. A correlation between band-gap and resistivity for all of the electro-annealed thin films was observed.
URI: http://doi.org/10.1016/j.vacuum.2015.06.027
http://hdl.handle.net/11147/5857
ISSN: 0042-207X
0042-207X
Appears in Collections:Physics / Fizik
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

Files in This Item:
File Description SizeFormat 
5857.pdfMakale1.5 MBAdobe PDFThumbnail
View/Open
Show full item record

CORE Recommender

SCOPUSTM   
Citations

29
checked on Jul 31, 2021

WEB OF SCIENCETM
Citations

30
checked on Jul 31, 2021

Page view(s)

18
checked on Aug 5, 2021

Download(s)

14
checked on Aug 5, 2021

Google ScholarTM

Check

Altmetric


Items in GCRIS Repository are protected by copyright, with all rights reserved, unless otherwise indicated.