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https://hdl.handle.net/11147/5857| Title: | Improvement of Optical and Electrical Properties of Ito Thin Films by Electro-Annealing | Authors: | Köseoğlu, Hasan Türkoğlu, Fulya Kurt, Metin Yaman, Mutlu Devran Akça, Fatime Gülşah Aygün, Gülnur Özyüzer, Lütfi |
Keywords: | Large area magnetron sputtering Annealing Thin films Energy gap ITO thin films |
Publisher: | Elsevier Ltd. | Source: | Köseoğlu, H., Türkoğlu, F., Kurt, M., Yaman, M. D., Akça, F. G., Aygün, G., and Özyüzer, L. (2015). Improvement of optical and electrical properties of ITO thin films by electro-annealing. Vacuum, 120, 8-13. doi:10.1016/j.vacuum.2015.06.027 | Abstract: | The effect of electro-annealing in vacuum and air on the optical and electrical properties of ITO thin films grown by large area DC magnetron sputtering was investigated. Moreover, the performances of the electro-annealed ITO thin films in vacuum and air were compared. Electro-annealing was performed by applying 0.75, 1.00, 1.25 and 1.50 A constant ac current to the ITO thin films. It was observed that the crystallinity of the films was better for the ITO thin films electro-annealed in vacuum. The changes in sheet resistance of electro-annealed ITO thin films with applied currents were detailed. The transmittance of the films increased for both electro-annealing in vacuum and air. A correlation between band-gap and resistivity for all of the electro-annealed thin films was observed. | URI: | http://doi.org/10.1016/j.vacuum.2015.06.027 http://hdl.handle.net/11147/5857 |
ISSN: | 0042-207X 0042-207X |
| Appears in Collections: | Physics / Fizik Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection |
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