MgB2 superconducting thin films grown by magnetron sputtering

Abstract

In this study, we report the growth and properties of MgB2 thin films on polycrystalline Al2O3 substrates. A composite MgB2 target was produced by MgB2 and Mg powder mixing, using a hot pressing technique. MgB2 thin films were grown on Al 2O3 substrates by d.c. magnetron sputtering, without heating the substrate. To enhance the superconducting properties of the as-grown films and to increase the crystal quality, an ex-situ anneal process was applied. The crystal structure of the thin films was determined by X-ray diffraction. The resistivity versus temperature of the deposited MgB2 thin films was studied to examine the transition temperatures of the films under various magnetic fields. The effects of the annealing temperature and annealing time on the electrical properties of MgB2 thin films are revealed.