• English
    • Türkçe
  • English 
    • English
    • Türkçe
  • Login
View Item 
  •   DSpace Home
  • 1. Fen Fakültesi / Faculty of Science
  • Physics / Fizik
  • View Item
  •   DSpace Home
  • 1. Fen Fakültesi / Faculty of Science
  • Physics / Fizik
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Realtime Access Map

Minority carrier properties of microcrystalline silicon thin films grown by HW-CVD and VHF-PECVD techniques

Thumbnail
View/Open
Conference Paper (157.3Kb)
Date
2005-02
Author
Okur, Salih
Göktaş, Oktay
Güneş, Mehmet
Finger, Friedhelm
Carius, Reinhard
Metadata
Show full item record
Abstract
Opto-electronic properties of μc-Si:H films prepared by hot-wire/catalytic chemical vapor deposition (HWCVD) and very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) techniques with various silane concentrations (SC) have been investigated using Raman spectroscopy, the steady-state photocarrier grating technique (SSPG), and the steady-state photoconductivity (SSPC). A correlation between the minority carrier transport properties and the microstructure has been found, using the dependence of the diffusion length (Ld) on the SC and Raman intensity ratio (I c RS) representing crystalline volume fractions. I C RS changes from 0.22 to 0.77. Ld increases with increasing Ic RS. It peaks around 0.5 with a maximum value of 270 nm, then decreases. Similar dependences of Ld on I C RS were obtained for films prepared by both HWCVD and VHF-PECVD. However, the grating quality factor measured on highly crystalline HWCVD films is substantially smaller than that found for VHF-PECVD films, indicating a relatively higher surface roughness present in the highly crystalline HWCVD films.
URI
http://hdl.handle.net/11147/2035
Collections
  • Physics / Fizik [414]
  • Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection [3276]
  • WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection [2953]


DSpace software copyright © 2002-2015  DuraSpace
Contact Us | Send Feedback
Theme by 
@mire NV
 

 



| IZTECH OS Policy |
DSpace@IYTE Guide |

DSpace@IZTECH

by OpenAIRE
Advanced Search

Browse

All of DSpaceCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsTypeDepartmentPublisherCategoryLanguageAccess TypeIZTECH AuthorThis CollectionBy Issue DateAuthorsTitlesSubjectsTypeDepartmentPublisherCategoryLanguageAccess TypeIZTECH Author

My Account

LoginRegister

Statistics

View Usage Statistics

DSpace software copyright © 2002-2015  DuraSpace
Contact Us | Send Feedback
Theme by 
@mire NV
 

 


|| IZTECH OS Policy || DSpace@IYTE Guide || Library || IYTE || OAI-PMH ||

IZTECH Library, Gülbahçe Kampüsü - 35430 - Urla, İzmir / TURKEY
If you find any errors in content, please contact: openaccess@iyte.edu.tr.

Creative Commons Lisansı
DSpace@IZTECH by IYTE Institutional repository is licensed under a Creative Commons Attribution-Gayriticari-NoDerivs 3.0 Unported License.

DSpace@IZTECH is member of: