Browsing by Subject High-k dielectric material
Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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Sep-2018 | Comparision of in situ spectroscopic ellipsometer and ex situ x-ray photoelectron spectroscopy depth profiling analysis of HfO2/Hf/Si multilayer structure | Cantaş, Ayten; Özyüzer, Lütfi ; Aygün, Gülnur |