Browsing "Physics / Fizik" by Subject Reactive rf sputtering
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| Nov-2014 | Impact of incorporated oxygen quantity on optical, structural and dielectric properties of reactive magnetron sputter grown high-? HfO2/Hf/Si thin film | Cantaş, Ayten; Aygün, Gülnur ; Turan, Raşit |