Browsing WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection by Subject "X ray photoelectron spectroscopy"
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Evolution of SiO2/Ge/HfO2(Ge) multilayer structure during high temperature annealing
(Elsevier, 2010-02)Use of germanium as a storage medium combined with a high-k dielectric tunneling oxide is of interest for non-volatile memory applications. The device structure consists of a thin HfO2 tunneling oxide with a Ge layer either ... -
Interfacial and structural properties of sputtered HfO2 layers
(American Institute of Physics Publising, 2009)Magnetron sputtered HfO2 layers formed on a heated Si substrate were studied by spectroscopic ellipsometer (SE), x-ray diffraction (XRD), Fourier transform infrared (FTIR), and x-ray photoelectron spectroscopy (XPS) depth ...