Browsing 1. Fen Fakültesi / Faculty of Science by Subject "XPS depth profiling"

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Effects of physical growth conditions on the structural and optical properties of sputtered grown thin HfO2 films

Aygün, Gülnur; Cantaş, Ayten; Şimşek, Yılmaz; Turan, Raşit (Elsevier, 2011-06)

HfO2 thin films were prepared by reactive DC magnetron sputtering technique on (100) p-Si substrate. The effects of O2/Ar ratio, substrate temperature, sputtering power on the structural properties of HfO2 grown films were ...