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Browsing 1. Fen Fakültesi / Faculty of Science by Author "Roeder, George"
Liu, Shijie; Roeder, George; Aygün, Gülnur; Motzek, Kristian; Evanschitzky, Peter; Erdmann, Andreas (Elsevier, 2012-05)A 3D model is set up to simulate the exposure process of inclined/rotated UV lithography for negative SU-8 resists. The formation of inclined resist pillars and microstructures with truncated cone shapes is simulated based ...