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Browsing by Author "Alaçakır, Ali"
Aygün Özyüzer, Gülnur; Atanassova, Elenada A.; Alaçakır, Ali; Özyüzer, Lütfi; Turan, Raşit (IOP Publishing, 2004-06)SiO2 thin films have been obtained by 1064 nm Nd: YAG laser oxidation of p-Si in the presence of O2. The thickness uniformity, dielectric and electrical properties of the layers have been studied. The effect of both the ...