Browsing by Subject "Hafnium oxides"
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Effects of physical growth conditions on the structural and optical properties of sputtered grown thin HfO2 films
(Elsevier, 2011-06)HfO2 thin films were prepared by reactive DC magnetron sputtering technique on (100) p-Si substrate. The effects of O2/Ar ratio, substrate temperature, sputtering power on the structural properties of HfO2 grown films were ... -
In-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering
(American Institute of Physics, 2014-08-28)We have investigated the reduction of unwanted interfacial SiO2 layer at HfO2/Si interface brought about by the deposition of thin Hf metal buffer layer on Si substrate prior to the deposition of HfO2 thin films for possible ...
