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Developing a trilayer processing technique for superconducting YBa 2Cu3O7-δ thin films by using Ge ion implantation
(IOP Publishing, 2005-04)
For making trilayer superconducting devices based on YBa2Cu 3O7-δ (YBCO) thin film processing, we developed a new technique by employing Ge ion implantation. A YBCO thin film of 150 nm thickness having high c-axis orientation ...