Browsing by Subject 3D simulation

Showing results 1 to 1 of 1
Issue DateTitleAuthor(s)
May-2012Simulation of 3D inclined/rotated UV lithography and its application to microneedlesLiu, Shijie; Roeder, George; Aygün, Gülnur ; Motzek, Kristian; Evanschitzky, Peter; Erdmann, Andreas