Metal mesh filters based on Ti, ITO and Cu thin films for terahertz waves
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In this study, we have investigated the spectral performance of resonant terahertz (THz) bandpass filters which were produced from thin films with a metal-mesh shape. The aforementioned filters were fabricated from titanium, copper and indium tin oxide thin films on fused silica substrates by UV lithography with an array of cross-shaped apertures. Since the mesh period, cross-arm length and its width specify the spectral characteristics of the filters, we were able to reveal the performance of these filters experimentally using both a THz time domain spectrometer and a Fourier transform infrared spectrometer. A commercial electromagnetic simulation software, CST microwave studio, was used to verify the experimental data. The transmission of the filters are in the range 20–55 % at their relevant center frequencies. To our knowledge this study is the first to show that fabricated patterns based on ITO thin films can be used to filter THz radiation.