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dc.contributor.authorKöseoğlu, Hasan
dc.contributor.authorTürkoğlu, Fulya
dc.contributor.authorKurt, Metin
dc.contributor.authorYaman, Mutlu Devran
dc.contributor.authorAkça, Fatime Gülşah
dc.contributor.authorAygün, Gülnur
dc.contributor.authorÖzyüzer, Lütfi
dc.date.accessioned2017-07-05T08:52:31Z
dc.date.available2017-07-05T08:52:31Z
dc.date.issued2015-10
dc.identifier.citationKöseoğlu, H., Türkoğlu, F., Kurt, M., Yaman, M. D., Akça, F. G., Aygün, G., and Özyüzer, L. (2015). Improvement of optical and electrical properties of ITO thin films by electro-annealing. Vacuum, 120, 8-13. doi:10.1016/j.vacuum.2015.06.027en_US
dc.identifier.issn0042-207X
dc.identifier.urihttp://doi.org/10.1016/j.vacuum.2015.06.027
dc.identifier.urihttp://hdl.handle.net/11147/5857
dc.description.abstractThe effect of electro-annealing in vacuum and air on the optical and electrical properties of ITO thin films grown by large area DC magnetron sputtering was investigated. Moreover, the performances of the electro-annealed ITO thin films in vacuum and air were compared. Electro-annealing was performed by applying 0.75, 1.00, 1.25 and 1.50 A constant ac current to the ITO thin films. It was observed that the crystallinity of the films was better for the ITO thin films electro-annealed in vacuum. The changes in sheet resistance of electro-annealed ITO thin films with applied currents were detailed. The transmittance of the films increased for both electro-annealing in vacuum and air. A correlation between band-gap and resistivity for all of the electro-annealed thin films was observed.en_US
dc.language.isoengen_US
dc.publisherElsevieren_US
dc.relation.isversionof10.1016/j.vacuum.2015.06.027en_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectLarge area magnetron sputteringen_US
dc.subjectAnnealingen_US
dc.subjectThin filmsen_US
dc.subjectEnergy gapen_US
dc.subjectITO thin filmsen_US
dc.titleImprovement of optical and electrical properties of ITO thin films by electro-annealingen_US
dc.typearticleen_US
dc.contributor.authorIDTR204917en_US
dc.contributor.authorIDTR39698en_US
dc.contributor.authorIDTR5135en_US
dc.contributor.iztechauthorKöseoğlu, Hasan
dc.contributor.iztechauthorTürkoğlu, Fulya
dc.contributor.iztechauthorKurt, Metin
dc.contributor.iztechauthorYaman, Mutlu Devran
dc.contributor.iztechauthorAkça, Fatime Gülşah
dc.contributor.iztechauthorAygün, Gülnur
dc.contributor.iztechauthorÖzyüzer, Lütfi
dc.relation.journalVacuumen_US
dc.contributor.departmentİYTE, Fen Fakültesi, Fizik Bölümüen_US
dc.identifier.volume120en_US
dc.identifier.startpage8en_US
dc.identifier.endpage13en_US
dc.identifier.wosWOS:000361405300003
dc.identifier.scopusSCOPUS:2-s2.0-84941418863
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US


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