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dc.contributor.authorSalah, Mohammed H.
dc.contributor.authorBayrak, Alper
dc.contributor.authorTatlıcıoğlu, Enver
dc.date.accessioned2017-03-03T13:38:42Z
dc.date.available2017-03-03T13:38:42Z
dc.date.issued2011
dc.identifier.citationSalah, M. H., Bayrak, A., and Tatlıcıoğlu, E. (2011, March 3-5). Filter-based control for parallel plate micro electrostatic actuators. Paper presented at the International Conference on Communications, Computing and Control Applications. doi:10.1109/CCCA.2011.6031405en_US
dc.identifier.isbn9781424497959
dc.identifier.urihttp://doi.org/10.1109/CCCA.2011.6031405
dc.identifier.urihttp://hdl.handle.net/11147/4970
dc.descriptionInternational Conference on Communications, Computing and Control Applications, CCCA 2011; Hammamet; Tunisia; 3 March 2011 through 5 March 2011en_US
dc.description.abstractIn this paper, a filter-based nonlinear control strategy for parallel-plate micro electrostatic actuators is designed. The proposed control technique utilizes the measurements of the micro actuator's movable plate displacement and the device internal charge. The information of the micro actuator's movable plate velocity is utilized as well in the control synthesis but since it is difficult to be measured, filtered signals are designed and utilized to facilitate the control development. A Lyapunov-based analysis is presented which proves that a desired time-varying displacement of the micro actuator's movable plate is accurately tracked. The proposed nonlinear controller is capable of controlling the movable plate beyond the pull-in boundary that is one third of the capacitive gap. Representative numerical simulations are introduced to demonstrate the performance of the proposed filter-based nonlinear control strategy in accurately tracking the deflection of the micro electrostatic movable plate within the entire capacitive gap. Finally, a comparison with a standard PID controller is also presented to demonstrate the effectiveness of the proposed control design. © 2011 IEEE.en_US
dc.language.isoengen_US
dc.publisherIEEEen_US
dc.relation.isversionof10.1109/CCCA.2011.6031405en_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectElectrostatic actuatorsen_US
dc.subjectNonlinear control systemsen_US
dc.subjectMEMSen_US
dc.subjectControllersen_US
dc.titleFilter-based control for parallel plate micro electrostatic actuatorsen_US
dc.typeconferenceObjecten_US
dc.contributor.authorIDTR127688en_US
dc.contributor.authorIDTR123720en_US
dc.contributor.iztechauthorBayrak, Alper
dc.contributor.iztechauthorTatlıcıoğlu, Enver
dc.relation.journalInternational Conference on Communications, Computing and Control Applicationsen_US
dc.contributor.departmentİYTE, Mühendislik Fakültesi, Elektrik-Elektronik Mühendisliği Bölümüen_US
dc.identifier.scopusSCOPUS:2-s2.0-80054827300
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US


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