Browsing by Author "Erdmann, A."

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Determination of the Dill parameters of thick positive resist for use in modeling applications

Roeder, G.; Liu, S.; Aygün, Gülnur; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L (Elsevier, 2011-02)

The determination of Dill parameters of thick resist is very important to improve simulation models of resist exposure and real world processes. A new extraction technique of Dill parameters based on spectroscopic ellipsometry ...